论文标题

SID检测器的P-Spray/P-Stop植入SI传感器的性能研究

Performance Studies of the p-spray/p-stop implanted Si Sensors for the SiD Detector

论文作者

Saxena, Pooja, Ranjan, Kirti, Bhardwaj, Ashutosh, Shivpuri, R. K., Bhattacharya, Satyaki

论文摘要

硅探测器(SID)是未来$ e^+e^ - $线性壁炉的拟议检测器之一,例如国际线性碰撞器(ILC)。 ILC的估计中子背景约为1-1.6 x 1010 1-meV等效中子CM-2 earm-1,用于用于最内向的顶点检测器中的Si微型带传感器。 P+ N-N+双面Si带传感器应用作SID的位置敏感传感器。在这些传感器的$ N^+ N^ - $侧,由于电子积累而导致的短路导致信号在所有N+条上的均匀扩散。因此,隔离间隔离成为主要技术挑战之一。实现串间隔离的有吸引力的方法之一是在硅表面上使用均匀的P型植入物(P-Spray)。另一种选择是使用围绕N-Strips(P-Stop)的浮动P型植入物。但是,已证明P-Spray/p-Stop边缘的高电场可引起损坏前的微型放电。需要对P-Spray和P-Stop的植入物剂量剖面进行优化,以实现良好的电气隔离,同时确保SI传感器的令人满意的分解性能。在目前的工作中,我们报告了使用Silvaco工具对$ N^+N^ - $ SI传感器进行的模拟研究的初步结果。

Silicon Detector (SiD) is one of the proposed detector for future $e^+e^-$ Linear colliders, like International Linear Collider (ILC). The estimated neutron background for ILC is around 1 - 1.6 x 1010 1-MeV equivalent neutrons cm-2 year-1 for the Si micro strip sensors to be used in the innermost vertex detector. The p+n-n+ double-sided Si strip sensors are supposed to be used as position sensitive sensors for SiD. On the $n^+n^-$ side of these sensors, shorting due to electron accumulation leads to uniform spreading of signal over all the n+ strips. Hence inter-strip isolation becomes one of the major technological challenges. One of the attractive methods to achieve the inter-strip isolation is the use of uniform p-type implant on the silicon surface (p-spray). Another alternative is the use of floating p-type implants that surround the n-strips (p-stop). However, the high electric fields at the edge of the p-spray/p-stop have been shown to induce pre-breakdown micro-discharge. An optimization of the implant dose profile of the p-spray and p-stop is required to achieve good electrical isolation while ensuring satisfactory breakdown performance of the Si sensors. In the present work, we report the preliminary results of simulation study performed on the $n^+n^-$ Si sensors, equipped with p-spray and p-stops, using SILVACO tools.

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