论文标题
离子Getter泵
Ion getter pumps
论文作者
论文摘要
离子Getter Pumps（IGP）用于创建超高vacuum。 IGP操作是由笔细胞结构触发的，该细胞结构使用电气和磁场的组合来限制电子并启动电离和Getter Pumping过程。在这几年中，已经开发出更多的IGP构型来应对不同的气体，例如反应性气体，氢气或贵重气体。当需要IGP达到低于10^（-8）MBAR的压力时，需要用整个真空系统烘烤它，以便加速泵内泵内的气体原子的释放，并且必须考虑泄漏当前的问题以进行可靠的压力读数。
Ion Getter Pumps (IGP) are used to create ultra-high-vacuum. The IGP operation is triggered by the Penning cell structure, which uses a combination of electrical and magnetic fields to confine electrons and start ionization and getter pumping processes. During the years, more IGP configurations have been developed to cope with different gases, such as reactive gases, hydrogen or noble gases. When the IGP is required to reach pressures lower than 10^(-8) mbar, it needs to be baked out with the whole vacuum system, in order to accelerate the release of the gas atoms trapped inside the pump materials, and the leakage current issue has to be taken into account for a reliable pressure reading.
