论文标题
电子束激活的聚合微作用器中的应力 - 应变
Stress-strain in electron-beam activated polymeric micro-actuators
论文作者
论文摘要
通过电子辐射对薄聚合物膜的致动是一种有前途的途径，可以根据应变工程的二维（2D）材料实现设备。复杂的应变轮廓需要深入了解电子照射下聚合物层的力学。在本文中，我们报告了对电子诱导的对聚甲基丙烯酸酯（PMMA）薄膜材料的应力的详细研究。在使用基于介电悬臂的方法评估应力值之后，我们直接研究了外延石墨烯对PMMA模式的横向收缩，该石墨烯揭示了一种普遍的行为，与电子加速能量无关。通过了解应力 - 应变曲线，我们最终估计了在石墨烯之上有效的PMMA的Young模量，这是基于PMMA的电子束光刻和应变工程应用的相关参数。
Actuation of thin polymeric films via electron irradiation is a promising avenue to realize devices based on strain engineered two dimensional (2D) materials. Complex strain profiles demand a deep understanding of the mechanics of the polymeric layer under electron irradiation; in this article we report a detailed investigation on electron-induced stress on poly-methyl-methacrylate (PMMA) thin film material. After an assessment of stress values using a method based on dielectric cantilevers, we directly investigate the lateral shrinkage of PMMA patterns on epitaxial graphene, which reveals a universal behavior, independent of the electron acceleration energy. By knowing the stress-strain curve, we finally estimate an effective Young's modulus of PMMA on top of graphene which is a relevant parameter for PMMA based electron-beam lithography and strain engineering applications.
