论文标题
关于HBN作为2D基于2D材料的超速CMOS设备的绝缘体的适用性
On the suitability of hBN as an insulator for 2D material-based ultrascaled CMOS devices
论文作者
论文摘要
互补的金属氧化物半导体(CMOS)逻辑电路处于最终缩放限制,对所有涉及的材料的性质提出了最大的要求。对半导体的需求进行了充分的探索,并且可能通过许多分层的二维(2D)材料(例如过渡金属二甲化物或黑磷)来满足。栅极绝缘子的要求可以说更具挑战性和难以满足。特别是,绝缘体与半导体的组合形成了金属氧化物半导体场效应晶体管(MOSFET)的核心元素,必须具有优质的质量才能建立竞争设备。目前,六角硼(HBN)是最常见的二维绝缘子,被广泛认为是纳米基于2D材料的晶体管中最有前途的栅极绝缘子。在这里,我们批判性地评估了HBN的材料参数,并得出结论,尽管其特性使HBN成为2D纳米电子应用中许多应用的理想候选者,但HBN很可能不适合作为超级CMOS设备的栅极绝缘体。
Complementary metal oxide semiconductor (CMOS) logic circuits at the ultimate scaling limit place the utmost demands on the properties of all materials involved. The requirements for semiconductors are well explored and could possibly be satisfied by a number of layered two-dimensional (2D) materials, like for example transition-metal dichalcogenides or black phosphorus. The requirements for the gate insulator are arguably even more challenging and difficult to meet. In particular the combination of insulator to semiconductor which forms the central element of the metal oxide semiconductor field effect transistor (MOSFET) has to be of superior quality in order to build competitive devices. At the moment, hexagonal boron nitride (hBN) is the most common two-dimensional insulator and widely considered to be the most promising gate insulator in nanoscaled 2D material-based transistors. Here, we critically assess the material parameters of hBN and conclude that while its properties render hBN an ideal candidate for many applications in 2D nanoelectronics, hBN is most likely not suitable as a gate insulator for ultrascaled CMOS devices.