论文标题

原子探针断层扫描中的优先蒸发:一种分析方法

Preferential evaporation in atom probe tomography: an analytical approach

论文作者

Hatzoglou, Constantinos, Rouland, Solène, Radiguet, Bertrand, Etienne, Auriane, da Costa, Gérald, Sauvage, Xavier, Pareige, Philippe, Vurpillot, François

论文摘要

原子探针断层扫描(APT)分析条件在组成测量准确性中起主要作用。优先蒸发与APT中其他知名现象相比,显着偏向明显的组成,与这些分析条件密切相关。因此,优化它们的一种方法,以实现最准确的测量,因此能够预测并估计它们对明显组成的影响。提出了一个分析模型来量化优先蒸发。该模型应用于三种不同的合金:NICU,FECRNI和FECU。该模型不仅解释了已经存在的模型中的分析温度依赖性,还解释了对脉冲分数和脉冲频率的依赖性。此外,该模型还可以提供与能量屏障直接连接的能量常数,以使场从样品表面蒸发原子所需。 2

Atom probe tomography (APT) analysis conditions play a major role in the composition measurement accuracy. Preferential evaporation, which significantly biases apparent composition, more than other well-known phenomena in APT, is strongly connected to those analysis conditions. One way to optimize them, in order to have the most accurate measurement, is therefore to be able to predict and then to estimate their influence on the apparent composition. An analytical model is proposed to quantify the preferential evaporation. This model is applied to three different alloys: NiCu, FeCrNi and FeCu. The model explains not only the analysis temperature dependence, as in already existing model, but also the dependence to the pulse fraction and the pulse frequency. Moreover, the model can also provide energetic constant directly linked to energy barrier, required to field evaporate atom from the sample surface. 2

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