论文标题
通过纳米力学扫描显微镜分析直接作品等离激子AU结构中的碳含量
Analysis of carbon content in direct-write plasmonic Au structures by nanomechanical scanning absorption microscopy
论文作者
论文摘要
化学含量的确定对于高精度装置制造和高级过程开发中的质量控制至关重要。对于可靠的化学成分表征，对于常规技术，例如能量分散性X射线光谱（EDX）和电子能量损耗光谱（EELS），目标材料的某些相互作用体积是必需的。然而，这仍然是纳米结构的挑战。我们在此提出了一种替代技术，用于测量体积有限的纳米结构的化学组成。通过测量由于化学成分的差异而与纳米力学谐振器的谐振频率差异以及分析光学模型的帮助，我们证明了表征直接电子束型在直接电子束诱导的DEMOSIONTION（FEBIDEBIDER（FEBID）的碳含量（FeBID），我们证明了纳米结构的差异。
The determination of the chemical content is crucial for the quality control in high-precision device fabrication and advanced process development. For reliable chemical composition characterization, certain interaction volume of the target material is necessary for conventional techniques such as energy-dispersive X-ray spectroscopy (EDX) and electron energy loss spectroscopy (EELS). This remains however a challenge for nanostructures. We hereby propose an alternative technique for measuring chemical composition of nanostructures with limited volume. By measuring the differences in the optical absorption of the nanostructure due to the differences in the chemical composition with the resonance frequency detuning of a nanomechanical resonator as well as the assistance of the analytical optical modelling, we demonstrate the possibility of characterizing the carbon content in the direct-write focused electron beam induced deposition (FEBID) gold nanostructures.
