论文标题
低温下Al/ge Schottky和欧姆接触的特征
Characteristics of Al/Ge Schottky and Ohmic contacts at low temperatures
论文作者
论文摘要
Schottky屏障接触已通过Al(100)GE(80k时杂质浓度〜1010/cm3)的热沉积制造,该障碍物显示了外部P型到附近的内在n型跃迁。 P和N型GE均表现出理想的Schottky行为,其低反向电流和接近统一的理想因素是从温度依赖性电流 - 电压(I-V)特性的线性形式获得的。在各种温度下的二极管电流在非零施加偏置下改变了其方向,这反映了电荷中性水平(CNL)的转变,从ge的费米水平上。随着温度的升高,P-GE的Schottky屏障高度(SBH)稳步增加,这可以根据CNL观察到的变化来理解。从零偏见理查森图确定的SBH值与从Schottky-mott规则中估计的界面固定界面的估计非常吻合。激活能是从Richardson图在各种正向电压下确定的,发现随着N-GE的施加偏差而减小,但对于P-GE的偏置降低至零,该p-ge显示出类似于Al的功能。 Al/ge的退火诱导p型Al掺杂层的再生,该层逐渐降低了Al浓度向P-GE晶体。因此,Al掺杂的GE(P+)/GE(P)结构成了外部区域(低于180K)的线性电流电压(I-V)特性。在固有区域(高于180K)中,由于温度依赖于Al掺杂的GE层和GE晶体的电导率变化,在I-V曲线中观察到了整流。
Schottky barrier contact has been fabricated by thermal deposition of Al on (100) Ge (impurity concentration~1010/cm3 at 80K) that shows extrinsic p-type to intrinsic n-type transition near 180K. Both p and n-type Ge exhibits ideal Schottky behaviour with low reverse current and near unity ideality factors obtained from the linear form of temperature dependent current-voltage (I-V) characteristics. The diode current at various temperatures change its direction at non-zero applied bias that reflects a shift in position of charge neutrality level (CNL) from the Fermi level of Ge. With the rise in temperature, Schottky barrier height (SBH) steadily increases for p-Ge that can be understood on the basis of observed variation in CNL. Values of SBH determined from the zero bias Richardson plot agrees well with that estimated from the Schottky-Mott rule for strongly pinned interface. Activation energies are determined from the Richardson plot at various forward voltages and found to decrease with applied bias for n-Ge but reduces to zero for p-Ge that shows work function similar to Al. Annealing of Al/Ge induces regrowth of p-type Al doped Ge layer that exhibits gradual reduction of Al concentration towards p-Ge crystal. Al doped Ge(P+)/Ge (P) junction thus fabricated shows linear current-voltage (I-V) characteristics in the extrinsic region (below 180K). In the intrinsic region (above 180K), rectification is observed in the I-V curve due to temperature dependent change in conductivity of both Al doped Ge layer and Ge crystal.