论文标题
纳米力学弦谐振器中拉伸应力的通用长度依赖性
Universal length dependence of tensile stress in nanomechanical string resonators
论文作者
论文摘要
我们研究了自由悬浮的纳米力学弦谐振器中的拉伸应力，并观察到对谐振器长度的材料无关的依赖性。我们比较了强烈的压力刺激谐振器，该谐振器是根据四个不同材料系统制造的，基于氮化硅，结晶硅碳化物以及磷化磷脂的晶体。对于较短的谐振器，发现拉伸应力增加了约50％。我们建立了一个简单的弹性模型，以描述观察到的拉伸应力的长度依赖性。该模型准确地描述了我们的实验数据。这为压力工程的视角开辟了纳米力学弦谐振器的机械质量因素。
We investigate the tensile stress in freely suspended nanomechanical string resonators, and observe a material-independent dependence on the resonator length. We compare strongly stressed sting resonators fabricated from four different material systems based on amorphous silicon nitride, crystalline silicon carbide as well as crystalline indium gallium phosphide. The tensile stress is found to increase by approximately 50% for shorter resonators. We establish a simple elastic model to describe the observed length dependence of the tensile stress. The model accurately describes our experimental data. This opens a perspective for stress-engineering the mechanical quality factor of nanomechanical string resonators.
