论文标题

TM极化超材料的窄带滤波器的设计,制造和光谱表征

Design, fabrication, and spectral characterization of TM-polarized metamaterials-based narrowband infrared filter

论文作者

Mirbagheri, Golsa, Crouse, David T.

论文摘要

双曲线材料作为非磁性各向异性人工结构,在一个方向上显示金属特性,并在正交方向上显示出介电行为。该项目中提出的双曲线超材料过滤器的设计是用垂直于介电材料替代层的金属线网状网状的,它可以使TM中心波长保持不变,以使MDIR机构的不同入射光角度保持不变。该纳米结构的几何大小小于工作波长,并且由于双曲线分散体而支持大波形。与常规的Bragg堆栈相反,铜fakir床使滤光片的传输特性相同。为此,需要最先进的制造方法来在无定形硅和二氧化硅的替代层中制造如此小的尺寸。在这项工作中,首先,我们用RCWA和有限元方法演示了Bragg堆栈的模拟。然后,我们专注于用于制造过滤器的首次多步光刻方法。最后,我们使用傅立叶转换红外光谱法实验验证了制造过滤器的光学特性。实验和光谱数据表明,对于斜TM极化入射光,双曲线超材料过滤器的传输特性保持不变。

Hyperbolic Metamaterials, as a non-magnetic anisotropic artificial structure, show metal properties in one direction and dielectric behavior in orthogonal directions. The proposed hyperbolic metamaterial filter in this project is designed with the metal wire mesh perpendicular to the alternative layers of dielectric materials, keeps TM center wavelength unchanged for the different angle of incident light in MDIR regime. The geometric size of this nanostructure is smaller than the working wavelength and supports big wavevectors due to hyperbolic dispersion. In contrast with conventional Bragg stack, the copper fakir bed makes the transmission properties of the filter the same. For this purpose, the state-of-the-art fabrication methods are required to make such small dimensions in alternative layers of amorphous silicon and silicon dioxide. In this work, first we demonstrate the simulation of Bragg stack with RCWA and finite element methods. Then we focus on our first-time multistep lithography method used to fabricate the filter. Finally, we experimentally verify the optical characteristic of the fabricated filter using Fourier-transform infrared spectroscopy. The experimental and spectrometry data shows that transmission properties of the hyperbolic metamaterial filter remain the same for oblique TM polarized incident light.

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