论文标题
机器学习增强的有效光谱椭圆测量
Machine Learning-enhanced Efficient Spectroscopic Ellipsometry Modeling
论文作者
论文摘要
近年来,在众多现实世界应用中,机器学习(ML)广泛采用,从计算机视觉到数据挖掘和药物发现不等。在本文中,我们利用ML促进有效的膜制造,特别是原子层沉积(ALD)。为了在ALD过程开发中进步,该过程被用来生成薄膜及其随后在行业中的加速采用,必须了解基本的原子过程。为此,已经提出了用于监测膜生长的原位技术,例如光谱椭圆法(SE)。但是,原位与复杂的硬件有关,因此是资源密集型的。为了应对这些挑战,我们提出了一种基于ML的方法来加快膜厚度估计。所提出的方法具有更快的数据获取,降低硬件复杂性以及光谱椭圆测量法的更容易集成,以实现膜厚度沉积的原位监测。我们涉及TIO2 SE的实验结果表明,所提出的基于ML的方法提供了有希望的厚度预测准确性结果在+/- 1.5 nm之内88.76%,在+/- 0.5 nm间隔内为85.14%。此外,我们在较低的厚度下提供了高达98%的准确性,这是对现有基于SE的分析的显着改善,从而使我们的解决方案成为对超薄膜的厚度估算的可行选择。
Over the recent years, there has been an extensive adoption of Machine Learning (ML) in a plethora of real-world applications, ranging from computer vision to data mining and drug discovery. In this paper, we utilize ML to facilitate efficient film fabrication, specifically Atomic Layer Deposition (ALD). In order to make advances in ALD process development, which is utilized to generate thin films, and its subsequent accelerated adoption in industry, it is imperative to understand the underlying atomistic processes. Towards this end, in situ techniques for monitoring film growth, such as Spectroscopic Ellipsometry (SE), have been proposed. However, in situ SE is associated with complex hardware and, hence, is resource intensive. To address these challenges, we propose an ML-based approach to expedite film thickness estimation. The proposed approach has tremendous implications of faster data acquisition, reduced hardware complexity and easier integration of spectroscopic ellipsometry for in situ monitoring of film thickness deposition. Our experimental results involving SE of TiO2 demonstrate that the proposed ML-based approach furnishes promising thickness prediction accuracy results of 88.76% within +/-1.5 nm and 85.14% within +/-0.5 nm intervals. Furthermore, we furnish accuracy results up to 98% at lower thicknesses, which is a significant improvement over existing SE-based analysis, thereby making our solution a viable option for thickness estimation of ultrathin films.