论文标题
片上片上YB3+掺杂的波导放大器上的薄膜锂锂锂的放大器
On-chip integrated Yb3+-doped waveguide amplifiers on thin film lithium niobate
论文作者
论文摘要
我们报告了通过光刻辅助化学机械蚀刻剂制造的薄膜锂锂锂锂锂锂锂的制造和光学表征。制造的YB3+掺杂的尼橙色锂波导显示在1030 nm时在1030 nm时的传播损失低于0.13 db/cm，在1060 nm处显示0.1 db/cm。在1030 nm处的5 dB的内部净增益和1060 nm处的8 dB的内部净增益在由976nm激光二极管泵送的4.0 cm长波导上测量，表明分别在1030 nm和1060 nm处的单位长度为1030 nm和2 db/cm。集成的YB3+掺杂的硝酸锂波导放大器将使强大的增益平台的开发受益，并有望有助于薄膜基于尼obate的光子光子芯片的高密度整合。
We report the fabrication and optical characterization of Yb3+-doped waveguide amplifiers (YDWA) on the thin film lithium niobate fabricated by photolithography assisted chemo-mechanical etching. The fabricated Yb3+-doped lithium niobate waveguides demonstrates low propagation loss of 0.13 dB/cm at 1030 nm and 0.1 dB/cm at 1060 nm. The internal net gain of 5 dB at 1030 nm and 8 dB at 1060 nm are measured on a 4.0 cm long waveguide pumped by 976nm laser diodes, indicating the gain per unit length of 1.25 dB/cm at 1030 nm and 2 dB/cm at 1060 nm, respectively. The integrated Yb3+-doped lithium niobate waveguide amplifiers will benefit the development of a powerful gain platform and are expected to contribute to the high-density integration of thin film lithium niobate based photonic chip.
