论文标题
使用脉冲kev ion梁在传播中的飞行时间后坐力检测可以实现高深度分辨率的敏感多元素分析
Time-of-flight recoil detection in transmission using pulsed keV ion beams enables sensitive multi-element profiling with high depth resolution
论文作者
论文摘要
评估了使用脉冲keV离子束在传输几何形状检测的潜力，以评估薄膜和准2D系统的敏感多元素分析。尽管飞行时间方法可以同时检测多个元素，但在最大程度上，无论后坐力充电状态如何，KEV弹丸能量保证了高剂量下高敏感性的高逆后跨部分。我们使用22Ne和40AR作为通过薄碳箔传输的弹丸演示了该方法的功能，这些碳箔具有可选的生物涂料和单晶硅膜，用于不同的样品制备程序和晶体方向。对于较大的位置敏感检测器（0.13 SR），达到低于6 nm的高深度分辨率，灵敏度低于1014 Atoms/cm2。对于结晶靶标，我们显示了后坐力及其观察到的角度分布的概率如何取决于样品方向。
The potential of time-of-flight recoil detection in transmission geometry using pulsed keV ion beams for sensitive multi-element profiling of thin membranes and quasi-2D systems is assessed. While the time-of-flight approach allows for simultaneous detection of multiple elements, to the largest extent irrespective of recoil charge states, the keV projectile energies guarantee high recoil-cross sections yielding high sensitivity at low dose. We demonstrate the capabilities of the approach using 22Ne and 40Ar as projectiles transmitted through thin carbon foil featuring optional LiF-coatings and single crystalline silicon membranes for different sample preparation routines and crystal orientations. For a large position sensitive detector (0.13 sr), a high-depth resolution below 6 nm and sensitivity below 1014 atoms/cm2 was achieved. For crystalline targets, we show how the probability of creation and detection of recoils and their observed angular distribution depend on sample orientation.
