论文标题

纳米级静电控制在超干净的范德华瓦尔斯异质结构中,局部阳极氧化石墨门

Nanoscale electrostatic control in ultra clean van der Waals heterostructures by local anodic oxidation of graphite gates

论文作者

Cohen, Liam A., Samuelson, Noah L., Wang, Taige, Klocke, Kai, Reeves, Cian C., Taniguchi, Takashi, Watanabe, Kenji, Vijay, Sagar, Zaletel, Michael P., Young, Andrea F.

论文摘要

在All-Van der waals异质结构中,活性层,栅极介电和门电极是从具有低密度原子缺陷密度的二维晶体组装而成的。这种设计允许创建具有非常低疾病的二维电子系统,尤其是在活性层也具有本质上低疾病的异质结构中,例如结晶石墨烯层或金属二甲藻代基化金属元化杂质。缺少关键成分是纳米级静电控制,现有的用于局部大门的方法通常引入不必要的污染。在这里,我们描述了一个无抵抗的局部阳极氧化过程,用于在石墨门中构图下100nm特征,并将其随后的整合到全范围的异质结构中。我们将分数量子霍尔制度中的量子点接触定义为基准设备,并观察手性Luttinger液体行为的特征,表明在点接触附近没有外部散射中心。在整数量子厅策略中,我们证明了对边缘限制电位的原位控制,这是手性边缘状态精确控制的关键要求。该技术可以使能够制造能够在分数量子厅制度中的单个Anyon Control和相干边缘干涉测量的设备制造。

In an all-van der Waals heterostructure, the active layer, gate dielectrics and gate electrodes are assembled from two-dimensional crystals that have a low density of atomic defects. This design allows two-dimensional electron systems with very low disorder to be created, particularly in heterostructures where the active layer also has intrinsically low disorder, such as crystalline graphene layers or metal dichalcogenide heterobilayers. A key missing ingredient has been nanoscale electrostatic control, with existing methods for fabricated local gates typically introducing unwanted contamination. Here we describe a resist-free local anodic oxidation process for patterning sub 100nm features in graphite gates, and their subsequent integration into an all-van der Waals heterostructure. We define a quantum point contact in the fractional quantum Hall regime as a benchmark device and observe signatures of chiral Luttinger liquid behaviour, indicating an absence of extrinsic scattering centres in the vicinity of the point contact. In the integer quantum Hall regime, we demonstrate in situ control of the edge confinement potential, a key requirement for the precision control of chiral edge states. This technique may enable the fabrication of devices capable of single anyon control and coherent edge-state interferometry in the fractional quantum Hall regime.

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