论文标题
快速共振的mems扫描仪的片上频率调整
On-chip frequency tuning of fast resonant MEMS scanner
论文作者
论文摘要
报道了具有片上频率调音能力的压电驱动的高频磁场扫描镜的发育和表征。谐振扫描仪以超过140 kHz的频率运行，对两个正交运动模式的扫描角度为10°和6°，并具有40 V驱动。片上频率调整是通过与镜子主悬架相邻的电热致动器来实现的。电热致动器会产生全球和局部温度的升高，从而改变了悬浮刚度，从而改变了谐振频率。共振频率调整范围可达到5.5 kHz，在两种正交扫描运动模式中，调整仅在一个正交扫描模式中占主导地位。这打开了使用单个共振的MEMS扫描仪与双重正交共振模式进行精确调整2D Lissajous扫描模式的可能性
The development and characterisation of a piezoelectric actuated high-frequency MEMS scanning mirror with on-chip frequency tuning capability is reported. The resonant scanner operates at frequencies in excess of 140 kHz, generating scan angles of 10° and 6° for two orthogonal movement modes with 40 V actuation. On-chip frequency tuning is achieved through electrothermal actuators fabricated adjacent to the mirror main suspension. The electrothermal actuators produce a global and local temperature increase which changes the suspension stiffness and therefore the resonant frequency. A resonance frequency tuning range of up to 5.5 kHz is achieved, with tuning dominant on only one of the two orthogonal scan movement modes. This opens the possibility for precise tuning of a 2D Lissajous scan pattern using a single resonant MEMS scanner with dual orthogonal resonant modes producing full frame update rates up to 20 kHz while retaining the full angular range of both resonant movement modes
