论文标题
底物用飞秒激光脉冲照射后薄金属靶标的光热响应的影响
The impact of the substrate on the opto-thermal response of thin metallic targets following irradiation with femtosecond laser pulses
论文作者
论文摘要
飞秒脉冲激光器在过去几十年中已被广泛使用，因为它们能够在微观和纳米长度尺度上制造精确的图案。有效材料处理的关键问题是确定实验设置中使用的激光参数。尽管已经进行了系统的研究来独立强调每个参数的影响，但很少关注放置辐照固体的底物材料的作用。在这项工作中，对各种厚度的薄膜强调了底物的影响，这些薄膜表明底物的光学和热物理性能都会影响辐照膜上的热指纹，而在较小的薄膜大小下，影响较高。两种代表性的材料，硅和熔融二氧化硅已被选为不同光学和热物理行为（金和镍）薄膜的典型底物（金和镍），并评估了辐照固体的热响应和损伤阈值。底物的明显影响旨在为基于激光的制造设置和加工方案的新设计和更优化的设计铺平道路。
Femtosecond pulsed lasers have been widely used over the past decades due to their capability to fabricate precise patterns at the micro- and nano- lengths scales. A key issue for efficient material processing is the determination of the laser parameters used in the experimental set ups. Despite a systematic investigation that has been performed to highlight the impact of every parameter independently, little attention has been drawn on the role of the substrate material on which the irradiated solid is placed. In this work, the influence of the substrate is emphasised for films of various thicknesses which demonstrates that both the optical and thermophysical properties of the substrate affect the thermal fingerprint on the irradiated film while the impact is manifested to be higher at smaller film sizes. Two representative materials, silicon and fused silica have been selected as typical substrates for thin films of different optical and thermophysical behaviour (gold and nickel) and the thermal response and damage thresholds are evaluated for the irradiated solids. The pronounced influence of the substrate is aimed to pave the way for new and more optimised designs of laser-based fabrication set ups and processing schemes.
