论文标题
通过溅射原子层增强沉积（Salad）沉积的短期氧化铝氧化氧化铝多层纳米复合材料（Salad），通过对半导体的光学特性进行了建模。
Semiconductor-like Optical Properties Unveiled by Modeling of Short-Period Aluminum Oxide-Copper Multi-Layered Nanocomposites Deposited by Sputtering Atomic Layer Augmented Deposition (SALAD)
论文作者
论文摘要
在以前的出版物中，我们讨论了由300对Alox层和由溅射原子层增强沉积（沙拉）产生的多层纳米复合样品的光学性质。这些样品显示出异常的光谱反射率，无法通过常规手段很好地描述，不能被解释为组成材料的插值。然后需要计算模型来描述获得的结果并预测样品的其他材料特性。通过使用转移矩阵方法来描述基于组成材料的光谱反射率，然后使用分散方法来找到样品的复合折射指数。这些模型成功地描述了纯Cu，但在涉及Alox时遇到了较小的困难，因此，需要进行更多的研究，以正确地对非遗殖材料（如Alox）进行与当前算法进行建模，或者找到可以充分描述Cu和Alox的更好模型。实施的分散模型预测，由许多金属和介电的薄膜层组成的样品将显示出半导体样的行为。因此，这表明沙拉的溅射和ALD的结合允许产生新型金属基射线的半导体。
In our previous publication, we discussed the optical properties of multi-layered nanocomposite samples consisting of 300 pairs of an AlOx layer and a Cu layer produced from sputtering atomic layer augmented deposition (SALAD). These samples displayed unusual spectral reflectance that could not be well described via conventional means and could not be explained as an interpolation of the constituent materials. Computational models were then needed to both describe the results that were obtained and to predict the samples' other material properties. This process was approached by using the transfer-matrix method to describe the spectral reflectance based on the constituent materials, and then the dispersion method was used to find the composite index of refraction for the samples. The models successfully described pure Cu but encountered minor difficulties when it came to AlOx, as such, more research is needed to either properly model non-holomorphic materials like AlOx with the current algorithm or to find a better model that can adequately describe both Cu and AlOx. The dispersion model implemented predicts that the samples, composed of many thin film layers of metal and dielectric, would display semiconductor-like behavior. Therefore, this indicates that SALAD's combination of sputtering and ALD permits the generation of novel metal-dielectric based semiconductors.
