论文标题
通过瞬态测量调查铁电薄膜中的电荷诱捕
Investigating charge trapping in ferroelectric thin films through transient measurements
论文作者
论文摘要
提出了一种测量技术，以量化铁电薄膜中的极化损失，这是切换后头100秒内延迟时间的函数。该技术可用于通过分析极化损失的幅度和速率来研究铁电薄膜中的电荷捕获。已经在HF0.5ZR0.5O2（HZO）和HZO/AL2O3膜上进行了示例测量，这是脉冲宽度和温度的函数。发现去极化场，内部偏置场和电荷捕获的竞争效应导致极化损失速率对延迟时间的特征性高斯依赖性。由此，可以识别一个电荷陷阱和筛选模型，该模型描述了短时标准上极化损失的动力学。
A measurement technique is presented to quantify the polarization loss in ferroelectric thin films as a function of delay time during the first 100s after switching. This technique can be used to investigate charge trapping in ferroelectric thin films by analyzing the magnitude and rate of polarization loss. Exemplary measurements have been performed on Hf0.5Zr0.5O2 (HZO) and HZO/Al2O3 films, as a function of pulse width and temperature. It is found that the competing effects of the depolarization field, internal bias field and charge trapping lead to a characteristic Gaussian dependence of the rate of polarization loss on the delay time. From this, a charge trapping and screening model could be identified which describes the dynamics of polarization loss on short timescales.
