论文标题
用机械耦合的微振荡器成对进行同步
Synchronization in pairs of opto-thermally driven mechanically coupled micro-oscillators
论文作者
论文摘要
我们研究了成对夹紧的，机械耦合的硅微振荡器的同步现象。连续的波激光束用于将微光束驱动到极限循环振荡中，并使用干涉法检测振荡。不同尺寸的设备用于引入频率解齐，而连接微束的短硅桥则用作振荡器之间的机械耦合。在失调和耦合参数空间中，为MEMS系统绘制了同步区域，并将其与相应的集体参数模型的数值分析进行了比较。观察到三个振荡状态，即漂移状态，准周期状态和同步状态。数值模型还区分了同相和相位外同步，其中观察到在低耦合强度和低频失调处观察到异相同步。
We study the phenomenon of synchronization in pairs of doubly clamped, mechanically coupled silicon micro-oscillators. A continuous-wave laser beam is used to drive the micro-beams into limit cycle oscillations and to detect the oscillations using interferometry. Devices of different dimensions are used to introduce frequency detuning, and short silicon bridges connecting the micro-beams are used as mechanical coupling between the oscillators. The region of synchronization is plotted for the MEMS system in the detuning vs. coupling parameter space and compared with the numerical analysis of a corresponding, lumped-parameter model. Three states of oscillations are observed i.e. the drift state, quasi-periodic state, and the synchronized state. The numerical model also distinguishes between in-phase and out-of-phase synchronization where out-of-phase synchronization is observed at low coupling strengths and low frequency detuning.
