论文标题
用于惯性感应的准空石杂质激光干涉仪
Quasi-monolithic heterodyne laser interferometer for inertial sensing
论文作者
论文摘要
我们提出了一种针对高敏感性位移感应应用开发的紧凑型杂化激光干涉仪。该干涉仪由定制的棱镜和波动板组成，这些棱镜和波动板以准石器时代的形式组装，以实现微型化系统。干涉仪设计采用了共同模式排斥方案，以提供与常见环境噪声的高排斥比。真空中的实验测试显示，在100MHz时的位移灵敏度水平为11 pm/rthz，低至1Hz以上的0.6pm/rthz。原型单元的大小为20mm x 20mm x 10mm，重4.5克，随后可以集成到紧凑的系统中。
We present a compact heterodyne laser interferometer developed for high-sensitivity displacement sensing applications. This interferometer consists of customized prisms and waveplates assembled as a quasi-monolithic unit to realize a miniaturized system. The interferometer design adopts a common-mode rejection scheme to provide a high rejection ratio to common environmental noise. Experimental tests in vacuum show a displacement sensitivity level of 11 pm/rtHz at 100mHz, and as low as 0.6pm/rtHz above 1Hz. The prototype unit has a size of 20mm X 20mm X 10mm and weighs 4.5 grams, which allows subsequent integration into compact systems.
