论文标题
亚波材的间压波导和环谐振器在氮化硅平台上
Subwavelength grating metamaterial waveguides and ring resonators on a silicon nitride platform
论文作者
论文摘要
我们首次在氮化硅平台上提出并展示了亚波长（SWG）超材料的波导和环谐振器。 SWG波导经过设计，使得Bloch模式的53％的大重叠与顶部覆层材料达到了最大的重叠，从而证明了在Evanescent Field感应和光放大中应用的巨大潜力。这些设备的临界尺寸大于100 nm，是使用使用电子束光刻的商业快速转弯硅原型铸造工艺制造的。制造设备的实验表征显示出出色的环谐振器内部质量因子（2.11x10^5）和C波段中低的传播损失（〜1.5 dB/cm），与基于硅的SWG环谐振器相比，这两个参数都有显着改善。这些结果表明，基于氮化硅的光子综合电路，SWG超材料结构的前景有希望的前景。
We propose and demonstrate subwavelength grating (SWG) metamaterial waveguides and ring resonators on a silicon nitride platform for the first time. The SWG waveguide is engineered such that a large overlap of 53% of the Bloch mode with the top cladding material is achieved, demonstrating excellent potential for applications in evanescent field sensing and light amplification. The devices, which have critical dimensions greater than 100 nm, are fabricated using a commercial rapid turn-around silicon nitride prototyping foundry process using electron beam lithography. Experimental characterization of the fabricated device reveals excellent ring resonator internal quality factor (2.11x10^5) and low propagation loss (~1.5 dB/cm) in the C-band, a significant improvement of both parameters compared to silicon based SWG ring resonators. These results demonstrate the promising prospects of SWG metamaterial structures for silicon nitride based photonic integrated circuits.
