论文标题
用于定量SEM分析的原位标本方向调整的计算机视觉调整
Computer Vision Applied to In-Situ Specimen Orientation Adjustment for Quantitative SEM Analysis
论文作者
论文摘要
基于扫描电子显微镜（SEM）的使用（例如能量分散X射线光谱）的定量分析方法通常要求样品具有针对电子束的平坦表面面向正常的。将显微镜平面表面放入这种方向的原位程序通常依赖于立体方法，这些方法在表面被某些已知角度倾斜时测量表面矢量投影的变化。尽管过去已经使用了这些方法，但对于此类方法中涉及的不确定性的尚未详细的统计分析，这在标本如何准确地定向上留下了不确定性。在这里，我们提出了试样方向方法的第一原理推导，并将我们的方法应用于平面样本以证明它。与以前的工作不同，我们使用比例不变特征变换来开发计算机视觉程序，以自动化并加快对SEM图像进行测量的过程，从而对具有较大样本量的方法进行详细的统计分析。我们发现我们的样品取向方法能够以高精度定向平坦表面，并可以进一步洞悉标准SEM旋转和倾斜操作中涉及的错误。
Quantitative analysis methods based on the usage of a scanning electron microscope (SEM), such as energy dispersive x-ray spectroscopy, often require specimens to have a flat surface oriented normal to the electron beam. In-situ procedures for putting microscopic flat surfaces into this orientation generally rely on stereoscopic methods that measure the change in surface vector projections when the surface is tilted by some known angle. Although these methods have been used in the past, there is no detailed statistical analysis of the uncertainties involved in such methods, which leaves an uncertainty in how precisely a specimen can be oriented. Here, we present a first principles derivation of a specimen orientation method and apply our method to a flat sample to demonstrate it. Unlike previous works, we develop a computer vision program using the Scale Invariant Feature Transform to automate and expedite the process of making measurements on our SEM images, thus enabling a detailed statistical analysis of the method with a large sample size. We find that our specimen orientation method is able to orient flat surfaces with high precision and can further provide insight into errors involved in the standard SEM rotation and tilt operations.
