论文标题

可调快速电子传输氧化钛薄膜

Tunable Rapid Electron Transport in Titanium Oxide Thin Films

论文作者

Li, Runze, Yan, Faguang, Deng, Yongcheng, Sheng, Yu

论文摘要

量子井中的快速电子传输触发了许多新型的物理现象,并成为高速电子产品的关键点。在这里,我们发现氧化钛的电性能从半导体变为金属,因为氧化程度降低,并且在界面处形成了Schottky量子井。在研究多层薄膜的电运输特性时,我们考虑了不对称界面电子散射效果。开发了多层薄膜的新型物理电导率模型。我们发现电子将从低射击性的半导体和金属导电通道转移到具有平面内施加的电场的高动作schottky量子井导电通道。可以对Schottky量子中形成的2DEG的电子浓度和迁移率进行调节,因此纳米 - 设备表现出非线性电压电流曲线。随着室温下电场的增加,纳米设备的差异电阻率可以降低两个阶。在低温下,在我们的纳米驱动器中观察到了电子的弱电子定位,这进一步证明了Schottky量子中的2DEG存在。我们的工作将为我们提供有关多层薄膜中快速电子传输的新物理,并为现代微电子行业带来新颖的功能设备。

Rapid electron transport in the quantum well triggers many novel physical phenomena and becomes a critical point for the high-speed electronics. Here, we found electrical properties of the titanium oxide changed from semiconducting to metallic as the degree of oxidation decreased and Schottky quantum well was formed at the interface. We take the asymmetry interface electron scattering effect into consideration when studying the electrical transport properties of the multilayer thin films. A novel physical conductivity model for the multilayer thin films was developed. We found electron would be transferred from the low-mobility semiconducting and metallic conductive channels to the high-mobility Schottky quantum well conductive channel with an in-plane applied electric field. Electron concentration and mobility of the forming 2DEG in the Schottky quantum well could be tuned thus the nano-devices exhibited non-linear voltage-current curves. The differential resistivity of the nano-devices could decrease by two orders with increasing electric field at room temperature. Weak electron localization of electrons has been experimentally observed in our nano-devices at low temperature, which further demonstrated the existence of 2DEG in the Schottky quantum well. Our work will provide us new physics about the rapid electron transport in the multilayer thin films, and bring novel functional devices for the modern microelectronic industry.

扫码加入交流群

加入微信交流群

微信交流群二维码

扫码加入学术交流群,获取更多资源