论文标题
集成电路中的自动错误检测图像分割：数据驱动方法
Automatic Error Detection in Integrated Circuits Image Segmentation: A Data-driven Approach
论文作者
论文摘要
储层计算是预测湍流的有力工具，其简单的架构具有处理大型系统的计算效率。然而，其实现通常需要完整的状态向量测量和系统非线性知识。我们使用非线性投影函数将系统测量扩展到高维空间，然后将其输入到储层中以获得预测。我们展示了这种储层计算网络在时空混沌系统上的应用，该系统模拟了湍流的若干特征。我们表明，使用径向基函数作为非线性投影器，即使只有部分观测并且不知道控制方程，也能稳健地捕捉复杂的系统非线性。最后，我们表明，当测量稀疏、不完整且带有噪声，甚至控制方程变得不准确时，我们的网络仍然可以产生相当准确的预测，从而为实际湍流系统的无模型预测铺平了道路。
Due to the complicated nanoscale structures of current integrated circuits(IC) builds and low error tolerance of IC image segmentation tasks, most existing automated IC image segmentation approaches require human experts for visual inspection to ensure correctness, which is one of the major bottlenecks in large-scale industrial applications. In this paper, we present the first data-driven automatic error detection approach targeting two types of IC segmentation errors: wire errors and via errors. On an IC image dataset collected from real industry, we demonstrate that, by adapting existing CNN-based approaches of image classification and image translation with additional pre-processing and post-processing techniques, we are able to achieve recall/precision of 0.92/0.93 in wire error detection and 0.96/0.90 in via error detection, respectively.
