论文标题
双维光力学腔中的硅各向异性
Silicon anisotropy in a bi-dimensional optomechanical cavity
论文作者
论文摘要
在这项工作中，我们研究了2D光力晶体几何形状机械各向异性的影响。我们以不同的方向制造和测量设备，显示了机械光谱和光学机械耦合的依赖性，该耦合与设备的相对角度与硅晶体学方向的相对角度。我们的结果表明，设备方向强烈影响其机械带的结构，这使设备更容易受到制造缺陷的影响。最后，我们表明我们的设备与在MK温度下达到基态占用率的低温测量值兼容。
In this work, we study the effects of mechanical anisotropy in a 2D optomechanical crystal geometry. We fabricate and measure devices with different orientations, showing the dependence of the mechanical spectrum and the optomechanical coupling with the relative angle of the device to the crystallography directions of silicon. Our results show that the device orientation strongly affects its mechanical band structure, which makes the devices more susceptible to fabrication imperfections. Finally, we show that our device is compatible with cryogenic measurements reaching ground state occupancy of 0.2 phonons at mK temperature.
