论文标题
可改进的光电枪提案，用于改进低压成像
A Retrofittable Photoelectron Gun Proposal for Improved Low Voltage Imaging
论文作者
论文摘要
低压扫描电子显微镜是检查表面特征和成像光束敏感材料的强大工具。在低压成像过程中改善分辨率是一个重要的发展领域。降低色差的效果是改善分辨率的一种解决方案，可以通过减少电子源的能量扩散来实现。我们的方法涉及将光源改装到热离子灯笼六桥（LAB6）电子枪中，作为一种具有成本效益的低能传播光电发射器。预计发射极光电子的能量扩散在0.11-0.38EV之间，具体取决于紫外线的光子能量。原理图像的证明已使用此改装的光电子枪记录，并对其性能进行了分析。
Low voltage scanning electron microscopy is a powerful tool for examining surface features and imaging beam sensitive materials. Improving resolution during low voltage imaging is then an important area of development. Decreasing the effect of chromatic aberration is one solution to improving the resolution and can be achieved by reducing the energy spread of the electron source. Our approach involves retrofitting a light source onto a thermionic Lanthanum Hexaboride (LaB6) electron gun as a cost-effective low energy spread photoelectron emitter. The energy spread of the emitter's photoelectrons is predicted to be between 0.11-0.38eV depending on the photon energy of the UV light source. Proof of principle images have been recorded using this retrofitted photoelectron gun and an analysis of its performance is presented.
