论文标题
使用原子簇束中性原子显微镜中中性原子显微镜的对比反转
Contrast inversion in neutral atom microscopy using atomic cluster beams
论文作者
论文摘要
这项工作探讨了原子簇梁作为中性原子显微镜(NAM)测量的探针的可能性。使用平均尺寸$ \ sim $ 10 $^4 $原子/群集的KR簇的光束,我们证明可以获得地形对比度,类似于Monoatomic Beams。此外,使用SIO $ _2 $ _2 $/SI基板生长的MOS $ _2 $的原子薄膜我们表明,使用KR簇的NAM成像也可以在不期望地形对比度的域中进行。令人惊讶的是,与单子光束相比,这些图像显示出倒对比度。我们试图根据群集表面散射产生的角度分布来理解这些观察结果。最后,我们讨论了这些结果对使用原子簇束实现高侧侧分辨率中性显微镜的含义。
This work explores the possibility of atomic cluster beams as a probe for neutral atom microscopy (NAM) measurements. Using a beam of Kr clusters with mean size $\sim$ 10$^4$ atoms/cluster we demonstrate that topographical contrast can be obtained, similar to that in the case of monoatomic beams. Further, using atomically thin films of MoS$_2$ grown on SiO$_2$/Si substrate we show that NAM imaging using Kr clusters is also possible in domains where topographical contrast is not expected. Surprisingly, these images show an inverted contrast pattern when compared to the case of monoatomic beams. We attempt to understand these observations on the basis of angular distributions resulting from cluster-surface scattering. Finally, we discuss the implications of these results towards achieving a high lateral resolution neutral atom microscope using atomic cluster beams.